| Layout Design Rule Effects
on Capacitor Reliability James D. Oliver, Harlan C. Cramer, and Richard J. Porter Northrop Grumman Electronic Systems M/S 3K13, PO Box 1521 Baltimore MD 21203 j.oliver@ngc.com 410-765-0117 |
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| Keywords: Capacitor, Reliability, Dielectric Breakdown,
Lifetime, Design Rules Abstract A test mask was constructed to evaluate the capacitor layout design rules and their affect on the capacitor yield and reliability. This detailed study, evaluating capacitor design spacings as well as dielectric thickness shows that even perceived large spacings of 2-5 um in the overlay of top and bottom plate metals |
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| 10.3 PDF | Return to TOC |