| Yield Improvement
Methodology in a pHEMT GaAs Fabrication Facility James Oerth, Christopher Doucette, Sushila Singh, Sean Doonan Skyworks Solutions, Inc 20 Sylvan Road, Woburn, MA, 01801, USA Tel: (781) 376-3076, Email: jim.oerth@skyworksinc.com |
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| Keywords: pHEMT, GaAs, Yield Improvement Abstract Shrinking feature sizes, increasing circuitcomplexity, and stringent RF performance requirementsmake achieving high yield a considerable challenge. This paper presents a method to improve yield in a pHEMTGaAs wafer fabrication facility. A practical teamapproach and applied technical methods to support aneffective yield improvement effort are discussed. Severalcase studies are presented to illustrate the efforts andsuccess of the Skyworks-Woburn GaAs Fab YieldImprovement Team. |
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